Mid-frequency magnetron sputtering technology has gradually become the mainstream of sputtering coating technology, The reason why it is better than that of DC magnetron sputtering deposition is:
1. It is overcomed the phenomenon of anode disapear;
2.Weaken or eliminate the abnormal arc discharge of the target. Therefore, it can improve the process stability of the sputtering process, and improved the dielectric coating deposition rate for several times at the same time.
Our company research and development planer target, cyclinder target, twin targets, peer target and other forms of middle frequency sputtering target structure and layout. This machine is widely used in watch case,watch strap, mobilephone shell, golf clubs, hardware, table ware and so on, coated with TiN, TiC, TICN, TiAIN, CrN and other decorative coatings.
| Dimension | Ф800×H900mm | Ф1100×H1200mm | Ф1350×H1250mm | Ф1600×H1250mm | Ф1900×H1250mm |
| Coating | Multi-function metal coating,composite membrane, transparent conductive coating, increase return to shoot coating, electromagnetic shielding coating, decorative coating, etc | ||||
| Power supply | DC magnetron sputtering power supply,MF sputtering power supply,high pressure ion bombard power supply | ||||
| Target | DC magnetron sputtering target,MF twin targets,planer target,cyclinder target | ||||
| Vacuum chamber structure | Vertical signal door,vertical double doors | ||||
| Pump system | Molecule pump(diffusion pump)+Roots pump +Mechanical pump+Holding pump(optional: turbo pump,poly cold system) | ||||
| Air system | Mass flow controller(1-4road) | ||||
| Ultimate vacuum | 6×10-4pa（no-loading,clean chamber） | ||||
| Pumping time | No-loading from air to 5×10-3pa ＜13mins | ||||
| Workpiece motion mode | 6 axis / 8axis/9axis public and self rotation/frequency conversion stepless speed regulation | ||||
| Control mode | Manual+semi-automatic+Automatic integration/touch screen+PLC | ||||
| Remark | We can design the dimension of the equipment according to customers special technique requirement. | ||||
This machine is widely used in watch case,watch strap,mobilephone shell, golf clubs, hardware, table ware and so on,coated with TiN, TiC, TICN, TiAIN, CrN and other decorative coating.
