Magnetron sputtering (EMI) special coating equipment used in notebook computers, mobile phone shell, telephone, wireless communications, audio-visual electronics, remote control, navigation and medical tools, automatic control, with large magnetron power, alternating double target use, constant current output. The unique workpiece holder design is reasonable, fair rotation, large output, High yield, using quartz crystal oscillation to measure the layer thickness, can make precise film thickness. HMI PLC automatic control system, the coating parameters can be modified at any time.
| Chamber size | Φ1200×1500mm | Φ1400×1950mm | Φ1600×1950mm | Φ1800×1950mm | |
| Coating type | EMI shielding film, decorative film etc | ||||
| Power source | DC magnetron power supply + high voltage ion bombardment | ||||
| Cylindrical target | DC magnetron target (OFC target + stainless steel target) | ||||
| Chamber structure | Vertical double door,vertical single door | ||||
| Vacuum system | Mechanical pump + Roots pump + diffusion pump +holding pump (or optional: molecular pumps, poly-cold systems) | ||||
| Inflation system | Mass flow controller (1-3 road) | ||||
| Ultimate vacuum | 6×10-4 pa（empty loaded,clean room） | ||||
| Pumping time | Pump from atmosphere to 5*10-3,≦6 minutes | ||||
| Workpiece rotation mode | 6 axis / 8 axis / 9 axis rotation and revolution / frequency stepless | ||||
| Control mode | Manual+Semi-Automatic+Full automatic all in one mode, Touch screen + PLC | ||||
| Remark | We can design the dimension of the equipment according to customer’s special technique requirement. | ||||
Coat electromagnetic shielding (EMI) film on the surface of mobile phones, laptops, telephones, DVD and other electronic products plastic shell.
