This series of turbo molecular pump has the features of large pumping speed, high compression ratio, impact resistant, expands the application range of the molecular pump.
Turbo molecular pump has no selectivity, no memory effect for the pumping gas. Because it has high compression ratio for the large molecular weight gas, so the pump doesn't need to cold trap and oil baffle can obtain high vacuum and high vacuum cleaner.
It is widely application to light volt, lighting, aerospace, semiconductor, energy, military industry, laser materials, automobile, home appliances and various fields of vacuum technology.
| Technology parameter | TYFB-600K Compound molecular pump | TYFB-1200K Compound molecular pump | YFB-1600K Compound molecular pump | ||||
| High vacuum flange(mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
|
Foreline flange (mm) |
40 KF | 40 KF | 50KF | ||||
| Pumping speed(L/S) | 600 | 1200 | 1600 | ||||
| Compression ratio | N2 | >109 | >109 | >109 | |||
| H2 | >8X103 | >1X104 | >1X104 | ||||
|
Ultimate pressure (Pa) |
<8×10-8 | <5×10-7 | <8×10-8 | <5×10-7 | <8×10-8 | <5×10-7 | |
|
Motor revolutions
(n／min) |
24000 | 24000 | 21000 | ||||
| Vib | ≤0.1μm | ≤0.1μm | ≤0.15μm | ||||
| Starting time(min) | <5 | <5 | <6 | ||||
| Recommend backing pump | 4-8 L／S | 8-15 L／S | 15 L／S | ||||
|
Type of cooling |
Water cooling | Water cooling | water cooling | ||||
| Water cooling temperature | ≤25℃ | ≤25℃ | ≤25℃ | ||||
| Water cooling water flow rate(L/min) | 1 | 1 | 1 | ||||
| Baking temperature of pump body | <120℃ | <120℃ | <120℃ | ||||
| Pump inlet pressure(Pa) | 7000 | 7000 | 7000 | ||||
| The input voltage of the heater(v) | AC220 | AC220 | AC220 | ||||
|
Direction of motor mounting |
Vertical±5° | Vertical±5° | Vertical±5° | ||||
| Pump Weight (kg) | ≈26 | ≈31 | ≈35 |
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It is widely application to light volt, lighting, aerospace, semiconductor, energy, military industry, laser materials, automobile, home appliances and various fields of vacuum technology.
