Excitation energy to ensure the coatings with high density plasma, the high power pulsed magnetron sputtering (HIPIMS)power can help you obtain good coating results.
• The obtained film has excellent performance in terms of homogeneity, hardness, abrasion resistance and viscosity
• Can be used as an alternative to DC magnetron sputtering power supply, the use of existing magnetron sputtering system, without the need for equipment modification
• Multiple ionization and ion directed so that it can be used for channel filling and other processes
Features:
• Power up to 8 MW
• Arc reaction sensitivity
• Pulse duration and frequency setting
• Real time control and monitoring pulse
• Back interface
Customer benifit:
• High flexibility, applicable to a variety of scientific research and industrial processes
• Magnetron sputtering without droplets, minimal surface damage
• Convenient to match with existing cathode system and process condition
• Make full use of the target
• Best device connection settings
Product | Power supply | Output | Output | Cooling method |
[kW] | Voltage | Current | ||
[V] | [A] | |||
TruPlasma 4001 High power pulse power supply | 1000 | 1000 | 1000 | Air cooling |
TruPlasma 4002 High power pulse power supply | 2000 | 2000 | 1000 | Air cooling |
TruPlasma 4006 High power pulse power supply | 6000 | 2000 | 3000 | Air cooling |
TruPlasma 4008 High power pulse power supply | 8000 | 2000 | 4000 | Air cooling |