TruPlasma RF 1000 power supply—High productivity, stable technical process
Power coupling technique CombineLine(Combined output control circuit) with optimization of power conversion technology,greatly improving the production efficiency of RF plasma applications.
• Real output impedance 50, process flow stability
• Power can be adjusted between 1W~3000W
• Compact half 19 "design
Features:
• 80% power factor
• High stability and reliability
• Output impedance 50Ω
• Achieve precise control in low power
• The cable length flexible and changeable between the power supply and the matching box
Customer benefit:
• Reduce the cost
• Greatly extend the life of the equipment
• High productivity, stable process
• Good reproducibility
• Convenient system integration, lower cost
TruPlasma RF 7000 RF power supply series—The highest level of plasma excitation
High frequency power series products, achieve the best results:
• The use of leading radio frequency(RF)technology, has been widely welcomed
• Installed a large base, optimize the technical performance
• Matching box can be provided
• Power ranging from 10 kW to 50 kW
Features:
• Advanced design (electronic tube / transistor hybrid design)
• Technology maturity, 100% offset protection
• Multiple user control interface
• Continuous output and pulse output mode
Customer benefit:
• High reliability
• Even under extreme load matching conditions, can ensure a stable operation.
• Convenient system integration
• Support a variety of processing applications
Product | Power supply | Frequency | Cooling method | Power |
[kW] | [kHz] | [V] | ||
TruPlasma RF 1001 | 1 | 13560 | Water cooling | (±10%) 200;208 |
TruPlasma RF 1002 | 2 | 13560 | Water cooling | (±10%) 200;208 |
TruPlasma RF 1003 | 3 | 13560 | Water cooling | (±10%) 200;208 |
TruPlasma RF 7010 | 10 | 3390 | Water cooling | (±10%) 400 |
TruPlasma RF 7010 | 10 | 13560 | Water cooling | (±10%) 400 |
TruPlasma RF 7015 | 15 | 13560 | Water cooling | (±10%) 400 |
TruPlasma RF 7018 | 18 | 3390 | Water cooling | (±10%) 440 |
TruPlasma RF 7020 | 20 | 13560 | Water cooling | (±10%) 400 |
TruPlasma RF 7030 | 30 | 13560 | Water cooling | (±10%) 440 |
TruPlasma RF 7040 | 40 | 13560 | Water cooling | (±10%) 440 |
TruPlasma RF 7050 | 50 | 13560 | Water cooling | (±10%) 440 |