TruPlasma MF 3000 power supply—The highest level of plasma excitation
• Particularly compact structure
• Suitable for medium and small power supply
• Power ranges from 10 kW to 40 kW
• Been recognized by dual magnetron sputtering process market
Features:
• Fast arc management system, sine wave output waveform
• Wide range of output power
• Leading power technology
Customer benifit:
• Can achieve high-speed deposition rate
• Meet different process applications
• High reliability
TruPlasma MF 7000 power supply—The highest level of plasma excitation
• Superior performance
• Broad power and frequency range
• Fast arc management system
• Modular design
Features:
• Broad power and frequency range
• Advanced arc management technology, extremely low arc residual energy
• Fast arc management reaction
• Flexible design structure
• High output current
• Leading power technology
Customer benefit:
• Adjustable to various processes and applications
• Thin film deposition, and film uniformity
• High deposition speed in extremely technical conditions.
• Convenient system integration
• Wide range of power regulation
• High reliability
Product | Power supply | Frequency | Output | Cooling method | Power |
[kW] | [kHz] | Voltage | [V] | ||
[Usable Voltage] | |||||
TruPlasma MF 3010 | 10 | 20 - 100 | 900 - 4200* | Water cooling | (±10%) 200; 400 |
TruPlasma MF 3020 | 20 | 20 - 100 | 900 - 4200* | Water cooling | (±10%) 200; 400 |
TruPlasma MF 3030 | 30 | 20 - 100 | 900 -4200* | Water cooling | (±10%) 200; 400 |
TruPlasma MF 3040 | 40 | 20 - 100 | 900 - 4200* | Water cooling | (±10%) 200; 400 |