The treatment methods of vacuum coating machines of different processes are different. Inadvertent small faults may affect the normal operation of the whole machine and equipment. Problems need to be checked one by one. Experienced masters can often solve many problems. Speaking of the uniformity of the coating, this is one of the criteria to evaluate the quality of a vacuum coating machine. In the process of machine coating, in order to deal with the uneven coating of vacuum coating machine, it is necessary to check the problems that may affect the uniformity of the coating, and complete the detection and repair before mass production. The uniformity of the film will be affected by all the coating machines. Take the magnetron sputtering vacuum coating machine as an example:

The work of magnetron sputtering coating was not complicated originally. By using an efficient and stable sputtering source to bombard the target in a certain vacuum environment in the coating room, it is a PVD physical process to decompose the target. The decomposed target atoms form a film layer on the product surface by process deposition. In the reaction process, the influence of the uniformity of the magnetic field, the pressure maintaining of the vacuum environment and the shielding gas on the uniformity of the film should be considered. However, some of the inhomogeneous changes may be caused by the instability of sputtering source or target, which is difficult to deal with.

It should be known that, regardless of the accuracy of the monitor provided by the coating machine, it can only control the film thickness at a single point in the coating room, generally referring to the middle position of the product. By controlling the uniformity of the base point film, we can ensure the uniformity of the product film far away from the base point.

The vacuum environment is controlled by pumping. It needs accurate detection and control system to keep a stable vacuum at all times. When the vacuum reaches the required state, it needs to stop pumping. When the vacuum is lower than the required state, it needs to be pumped and stabilized in time. The vacuum degree of coating has a reasonable range, the smaller the range difference, the greater the precision required, the more difficult the control, and the better and more stable the relative voltage stabilization; the larger the range difference, the lower the precision, the lower the requirements for the detection and control system, the greater the relative pressure fluctuation, and the greater the impact on the uniformity of the film layer.

In the past few years, more and more customers have higher and higher requirements for the machine, especially in the aspects of film density and uniformity quality. For the manufacturers of coating machines, improving their own technology is the guarantee of competitiveness.