Rectangular cathode arc coating machine has combined rectange plane cathod arc ion coating technique,DC magnetron sputtering technique,MF magnetron sputtering technique and pulsed bias technique on one machine at the same time.This model has become the mainstream of metal coating. For it can not only run arc system alone or run magnetron sputtering system alone,but also can run these two systems in a same process at diffeent time according to their advantages to get a perfect coating.For example, at initial stage of coating process,arc system is operated for cleaning and based coating by using its high-energy particle bombardment,to enhance the adhension between coating and substrates,then run MF magnetron sputtering system to get the middle coating that is smooth and delicate, at last,operate DC magnetron sputtering to get atop gold coating or others.This machine can also be equiped with ion source,which can meet the needs of multi-functional coating,It is widely used in mold and middle&high-end sanitary ware industry.
It can observe deposition conditions look into from view window, and can do sputtering coating or rectangular cathodic arc coating on the products which loading on the planet type common rotation shelf, by magnetron sputtering device or rectangular cathode arc device, according to different process. Start the heating system heating the chamber when it vacuum, temperature can be set according to the different process of products.
| Dimenson | Ф1000×1200mm | Ф1250×1350mm | Ф1500×1200mm | Ф1600×1200mm |
| Total power | 50KW | 60KW | 65KW | 70KW |
| Coating | Decorative coating(TiN,TiC,TiZr, TiAlN,TiCr etc),metal coating, reactive coating and so on | |||
| Vacuum chamber structure | Vertical single(side) door, pump system postposition, double water-cooling | |||
| Vacuum system | Molecule pump(diffusion pump)+Roots pump +Holding pump+Mechanical pump | |||
| Workpiece motion mode | Planet type common rotation, baking temperature from room temperature to 450 ℃ controllable and adjustable | |||
| Target mode | Rectangular magnetron sputtering target, the quantity of sputtering target can option according to process and customer's require. | |||
| Control mode | Manual+Semi-auto+Automatic integration/touch screen+PLC | |||
| Remark | We can design the dimension of the equipment according to customers special technique requirement. |
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It is widely used in mold and middle&high-end sanitary ware industry, nowadays,this model has become the mainstream of metal coating.
