ITO conductive glass coating production line for capacitive touch screen. It designed with 15 vacuum chamber. It includes one inlet chamber, one outlet chamber, one inlet buffer chamber,one outlet buffer chamber, one inlet transfer chamber, one outlet transfer chamber and two transfer chambers; seven sputtering chamber, each sputtering chamber installed with four cathode. High vacuum chamber adopts flapper valve isolation.By changing the gas isolation can achieve multifunctional coating. Substrate holder orbit using magnetic guide transmission. Machine equipped with 26 sets turbo molecular pumps, 13 sets mechincal pumps to achieve stable pumping speed and uniform gas distribution.
Widely applied in all kinds of digital information systems, such as mobile phones, PDA, digital products.
1．Ultimate vacuum：7x10-4Pa.
2．Production cycle40~120 S/frame
3．Basic frame size：859*1500mm (can be customized)
4．Film uniformity：±2%
5．Film stability：up to international standards.
Widely applied in all kinds of digital information systems, such as mobile phones, PDA, digital products.
