Horizontal/vertical continuous magnetron sputtering AZO film production line has seven vacuum chambers.The first chamber is inlet chamber.The second chamber is inlet buffer chamber.The third chamber is inlet transfer chamber.The fourth chamber is processing chamber.The fifth part is outlet transfer chamber.The sixth part is outlet buffer chamber. The seventh parts is outlet chamber.
2 pairs MF twins Si target which adopts PCU04 closed loop control.The high quality isolated SiO2 layer is formed. 10 pairs cylinder AZO target to achieve high-quality transparent conductor AZO film. The designed processing size is width 1100mm, length 1400mm plan substrate material.Production and processing cycle can be optimized to 60-120 seconds; production line using molecular pump form isolated gas advanc design, production line using floating turbo molecular pump to get efficient isolation, stable pumping speed and uniform gas distribution .
The production line is used in the thin film solar cell. The transparent conductive film is used as an antireflective layer and a transparent electrode used in solar energy conversion efficiency can be improved , with the AZO thin film instead of ITO , can not only reduce the production cost, environmentally friendly and non-toxic , the film performance more stable.
1．Ultimate vacuum：7x10-4Pa.
2．Production cycle40~120 S/frame
3．Basic frame size：859*1500mm (can be customized)
4．Film uniformity：±2%
5．Film stability：up to international standards
Used in the thin film solar cell. The transparent conductive film is used as an antireflective layer and a transparent electrode used in solar energy conversion efficiency can be improved , with the AZO thin film instead of ITO , can not only reduce the production cost, environmentally friendly and non-toxic , the film performance more stable.
